Semiconductor-Grade Quartz Diffusion Tubes

Quartz boats are usually used in the high-temperature, harsh chemical corrosion operating conditions. During the operation, semiconductor wafers are placed in the quartz boat and inserted into the quartz diffusion tube. When the diffusion tube reaches to the required temperature (several hundred to several thousand degrees Celsius), process gases (e.g., O₂, N₂, H₂, Ar) and dopant gases (e.g., POCl₃, BBr₃) are introduced into the quartz diffusion tube through gas ports to perform the oxidation, diffusion and annealing on semiconductor wafers. Additionally, to improve diffusion uniformity and accuracy, some diffusion processes need to be carried out in a low-pressure environment. 

In advanced semiconductor manufacturing processes, any slight mistake or deficiency in these processes can lead to the failure of subsequent processes. Therefore, as crucial parts of semiconductor manufacturing, the quality of quartz diffusion tubes is significantly important and directly affects the yield and performance of semiconductor devices.

The Specifications of Semicorex  Semiconductor-Grade Quartz

Semicorex semiconductor-grade quartz diffusion tubes are meticulously manufactured from high-quality semiconductor-grade quartz material. The following are its specific parameters：

The parameters can be customized according to customer requirements.

The performance of Semicorex Semiconductor-Grade Quartz Diffusion Tubes

Relying on our experienced processing technology and reliable material selection, Semicorex semiconductor-grade quartz diffusion tubes demonstrate superior performance under the challenging operating conditions:

1. High-temperature resistance performance

Semicorex semiconductor-grade quartz diffusion tubes deliver remarkable high-temperature resistance, which enables them to operate stably in high-temperature environments up to 1200 ℃ without any deformation or damage.

2. Thermal stability performance

Boasting exceptional coefficient of thermal expansion, Semicorex semiconductor-grade quartz diffusion tubes are able to withstand thermal stress during rapid heating or cooling without easily cracking or deforming.

3. Chemical resistance performance

Semicorex semiconductor-grade quartz diffusion tubes deliver superior chemical inertness in high-temperature, harsh corrosive environments. This performance greatly prevents the contaminants generated from their reaction with process gases from affecting wafer quality.