PFA Wafer Carriers

Semicorex PFA Wafer Carriers are high-performance carriers designed for the safe handling, storage, and transportation of semiconductor wafers in an ultra-clean environment. The manufacture of advanced semiconductors ensures that PFA Wafer Carriers offer unmatched chemical resistance, thermal stability, and particle control from the integrity and cleanliness of the wafers during fabrication through to final testing.

Made from new PFA, these wafer carriers show great resistance to harsh chemicals like strong acids, bases, and solvents usually used in cleaning and etching wafers. PFA’s very low ion leaching and outgassing properties make it the preferred material for important cleanroom tasks, where even tiny amounts of contaminants can affect device yields.

PFA Wafer Carriers are made in clean rooms and work with Class 1 (ISO Class 3) clean room standards. The smooth, non-stick surface of PFA minimizes particle generation and adhesion, preventing contamination from residues or particulates. Additionally, PFA’s hydrophobic nature facilitates thorough rinsing and quick drying, further reducing the risk of cross-contamination during wet processing steps.

Each PFA Wafer Carrier is precisely made to make sure safe and even support of wafers during moving and keeping. Grooved slots help wafers with little contact, reducing stress and chipping on the edges of the wafers. Carriers come in many shapes to fit various sizes of wafers which include 100 mm, 150 mm, 200 mm, and 300 mm diameters. Optional tops and tight locking ways give extra safety against shock to the wares, vibration, and exposure to the environment.

Due to PFA’s excellent thermal resistance up to 260°C, it is compatible with high-temperature processes such as diffusion, oxidation, and chemical vapor deposition CVD. The carrier retains its structural integrity under repeated thermal cycling and therefore is suitable for both batch and automated processing environments.

PFA Wafer Carriers have wide applications in wafer cleaning, wet etching, photolithography CMP, and other front-end and back-end processes in IC fabrication. Their robust design and purity make them ideal for use in fabs, R&D labs, and OEM equipment requiring strict contamination control protocols.

Customized PFA wafer carriers can be developed to meet specific automation requirements, including robotic handling, track systems, and vertical/horizontal transport. Carriers are fully compatible with standard wafer handling equipment and semiconductor manufacturing tools.