PBN Heater

Semicorex Pyrolytic Boron Nitride PBN Heater is a high-purity, high-performance heating component designed for demanding applications where ultra-clean, chemically stable, and thermally efficient materials are essential. Manufactured through a chemical vapor deposition (CVD) process, PBN exhibits exceptional thermal conductivity, high-temperature resistance, and outstanding chemical inertness, making it the ideal choice for semiconductor processing, crystal growth, and vacuum applications.

PBN Heater is a heater that uses highly insulating PBN as a substrate and uses low-pressure thermal decomposition chemical vapor deposition (CVD) to coat conductive PG at low pressure (below 10torr) and high temperature. The main components of this composite heater are pyrolytic boron nitride (PBN) and pyrolytic graphite (PG). Due to its excellent corrosion resistance and high temperature resistance, it is mainly used for semiconductor substrate heating (used in MBE, MOCVD, sputtering coating, etc.); superconductor substrate heating; sample heating during sample analysis; electron microscope sample heating; metal heating; metal evaporation heating source, etc.

PBN is inert to corrosive gases; has high purity (greater than 99.99%); does not wet or react with most molten metals (it has the characteristics of a non-stick pan, and the metal can be used 100%); has good high temperature resistance (the maximum operating temperature is 2000℃); good density; good thermal shock resistance and other excellent properties make it an ideal material for preparing PBN-PG composite heaters. PG can be heated rapidly to 1600℃ (in an inert atmosphere and under vacuum) in a PBN heater. At the same time, combined with the good thermal conductivity of PBN, the heating surface has good heat uniformity. With the rapid development of related industries, the demand for PBN-PG composite heaters has also increased rapidly.

PBN heaters can be fabricated in a variety of shapes and configurations to meet specific design and integration requirements. Typical designs include planar heaters, tubular heaters, and custom geometries with embedded or surface-mounted heating elements. The heating elements are usually made of pyrolytic graphite (PG) and encapsulated in PBN, providing a completely sealed, electrically insulating, and thermally efficient structure.