Porous Alumina Vacuum Chuck

The vacuum chuck is connected to the vacuum equipment via a connecting tube. When the vacuum chuck comes into contact with the workpiece, such as a wafer/thin film material, the vacuum equipment starts working, creating a negative pressure inside the vacuum chuck. Under atmospheric pressure, the workpiece adheres firmly to the vacuum chuck, allowing for processing. After processing is complete, the vacuum equipment stops working and slowly fills the vacuum chuck with gas, automatically separating the workpiece from the chuck. This completes the clamping, processing, and handling of the workpiece.

The core goal of semiconductor photolithography is to "print" billions of transistor circuit patterns onto a wafer with nanometer-level precision. The essence of "photolithography" is to use a light source to irradiate highly photosensitive photoresist, causing a chemical reaction that etches the circuit. However, when the light source irradiates the wafer, it inevitably also shines on the electrostatic chuck, which serves as the wafer carrier. The resulting reflected secondary light can interfere with the photolithography process, causing exposure in unintended areas and damaging the circuitry. Therefore, a black surface for the vacuum chuck minimizes reflection, ensuring the precision requirements of the photolithography system. Based on this capability, black alumina can be widely used not only in electrostatic chucks but also in "light-suppressing" scenarios. The advent of the AI era has enabled significant development in optical communication applications, and black alumina substrates are frequently seen in the packaging of optoelectronic devices and light-emitting elements.

Black alumina ceramic is made primarily of Al2O3, with transition metal oxides as colorants and sintering aids added, sintered at a specific temperature. The colorant is a crucial component of this type of ceramic, determining its final color. When selecting colorants for vacuum chucks, it is essential to ensure the degree of color, mechanical strength, porosity, and pore size of the vacuum chuck.

Currently, commonly used transition metal oxides as colorants both domestically and internationally include Fe2O3, CoO, NiO, Cr2O3, and MnO2, with Fe2O3, CoO, NiO, and MnO2 being the most prevalent. Because alumina is less volatile at high temperatures, while transition metal oxides are the opposite, their volatility increases with temperature. These oxides form spinel-type compounds during high-temperature sintering, which reduces their volatility. Therefore, to suppress the volatilization of transition metal oxides, appropriate process conditions should be selected to allow them to combine into spinel-type compounds at lower temperatures.

Semicorex offers customs porous ceramic vacuum chuck. If you have any inquiries or need additional details, please don't hesitate to get in touch with us.

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