Black Alumina Ceramic Vacuum Chucks

Black alumina ceramic is sintered at high-temperature, with Al₂O₃ as the primary component, transition metal oxides as colorants, and sintering aids added. Formulated with a proprietary ratio, black alumina ceramic achieves a controlled porosity ranging from 35% to 40%, and its pore sizes can reach the micrometer or nanometer scale. Semicorex black alumina ceramic vacuum chucks are meticulously manufactured from this microporous black alumina ceramic. Usually connected to the vacuum equipment, Semicorex black alumina ceramic vacuum chucks leverage these uniformly distributed micropores to firmly and evenly clamp and fix semiconductor wafers and substrates, thereby ensuring uninterrupted stability during processing operations.

The Advantages of Semicorex black alumina ceramic vacuum chucks

1. Stably and evenly clamping and fixing performance

2. Exceptional optical properties for stray light inhibition

3. Excellent material properties, like high hardness, strength, wear resistance and thermal and corrosion resistance

4. Long service life

5. Cost-effective pricing

The applications of Semicorex black alumina ceramic vacuum chucks

1. Semiconductor manufacturing and photovoltaic industry

Due to their porous structure, Semicorex black alumina ceramic vacuum chucks can evenly clamp and fix wafers of different dimensions, thus avoiding wafer deformation and displacement caused by uneven adsorption force during processing. They are adopted in the cutting-edge semiconductor manufacturing processes like photolithography, etching, and ion implantation and photovoltaic industry like production of solar cells.

2. Precision optical processing industry

Semicorex black alumina ceramic vacuum chucks are well-suited for the processing and assembly of optical components (such as lenses, prisms, and mirrors). Thanks to their exceptional optical properties for stray light inhibition, Semicorex black alumina ceramic vacuum chucks can greatly prevent stray light from affecting the accuracy of optical detection.

3. Aerospace and military industries

Semicorex black alumina ceramic vacuum chucks are ideal for the machining and assembly of precision components in the aerospace and military industries. The inherent properties of the black alumina ceramic vacuum chucks allow them to withstand extreme working environments characterized by high intensity, high temperature, and high corrosion.