Inner Guide Tube

Semicorex Inner Guide Tube is a precision-engineered carbon/carbon (C/C) component designed for advanced high-temperature thermal field applications, particularly in the growth of high-purity silicon crystals. As a critical element within crystal growth furnaces, this component plays a central role in shaping and stabilizing the thermal gradient, ensuring optimal crystal formation and consistent material quality.

Manufactured from high-density carbon fiber-reinforced carbon composite, the Inner Guide Tube offers exceptional structural integrity and thermal stability under extreme conditions. With a density of ≥1.35 g/cm³ and a flexural strength of ≥110 MPa, it maintains mechanical robustness even during prolonged exposure to elevated temperatures. These properties are essential in semiconductor-grade silicon production, where even minor fluctuations in thermal conditions can significantly affect crystal uniformity and defect rates.

Core Functionality: Precision Gradient Control

The primary role of the C/C Inner Guide Tube is to construct a precise gradient temperature field. During the silicon crystal growth process, it is positioned directly above the melt to:

Direct Gas Flow: It guides the flow of inert argon gas, ensuring that silicon oxide (SiO) vapors are efficiently swept away from the melt surface, preventing oxygen contamination in the crystal.

Thermal Shielding: It shields the growing crystal from direct heat radiation from the crucible walls, establishing the steep axial temperature gradient necessary for high-speed, high-quality crystal pulling.

Energy Efficiency: By concentrating heat within the melt zone and insulating the upper furnace components, it significantly reduces total power consumption.

Technical Specifications & Material Excellence

Our Inner Guide Tubes are manufactured using high-density Carbon/Carbon composites, providing a superior alternative to traditional graphite. The material properties are optimized for the extreme conditions of semiconductor vacuum furnaces:

Density: ≥ 1.35 g/cm³

Flexural Strength: ≥ 110 MPa

Coefficient of Thermal Expansion (CTE): ≤ 1.0 × 10⁻⁶ /K

Thermal Conductivity (Room Temperature): ≤ 10 W/(m·K)

Industry

As the industry moves toward larger wafer sizes (300mm and 450mm), the demands on the thermal field increase exponentially. Our Inner Guide Tubes are compatible with major CZ furnace brands and can be customized in terms of geometry and coating.