Horizontal Quartz Wafer Boats

Horizontal quartz wafer boats commonly hold semiconductor wafers horizontally within the furnace tubes of heat treatment equipment, heated by external heating devices. They are widely used in demanding high-temperature corrosive semiconductor heat treatment processes, such as thermal oxidation, high-temperature diffusion, annealing, and chemical vapor deposition (CVD) processes.

The functions of Semicorex horizontal quartz wafer boats

1.Stable holding and securing

Semicorex horizontal quartz wafer boats have excellent load-bearing capacity and can constantly offer stable support for multiple semiconductor wafers. And their optimized external design and precisely slot structure ensure each wafer is perfectly fitted and firmly secured on the horizontal quartz wafer boats, which significantly reduces the wafer scratches and collisions caused by shaking, displacement, and tilting during transport and manufacturing processes.

2.Process uniformity assistance

The equal spacing slot structure of horizontal quartz wafer boats allows for the orderly placement of semiconductor wafers, thus creating a stable and smooth gas flow field in the high-temperature furnaces. The structural design achieves consistent gas contact and reaction rate on each wafer surface, thereby effectively reducing various defects caused by the uneven heating and differential gas contact, such as incomplete wafer oxidation, uneven thin-film deposition, and doping concentration deviation.

3.Long-lasting service life

Thanks to the superior high-temperature resistance of quartz material, Semicorex horizontal quartz wafer boats can withstand high temperatures of 1100-1200℃ for a long time without deformation or melting. Quartz is chemically inert to gases commonly used in semiconductor processes, such as oxygen, nitrogen, and hydrogen chloride. This exceptional chemical inertness can minimize the risk of corrosion from process gases, greatly extending the service life and reducing equipment replacement time and costs.