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Graphite Susceptor with SiC Coating

Semicorex Graphite Susceptor with SiC Coating is an essential component designed for silicon epitaxy processes in Applied Materials and LPE (Liquid Phase Epitaxy) units. Crafted from high-quality graphite material coated with Silicon Carbide (SiC), this susceptor ensures superior performance and longevity in semiconductor manufacturing environments. Semicorex is committed to providing quality products at competitive prices, we look forward to becoming your long-term partner in China.

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Product Description

The SiC coating on the Graphite Susceptor with SiC Coating serves multiple purposes. Firstly, it provides enhanced thermal stability, allowing for precise control over temperature gradients during epitaxial growth processes. This stability is crucial for achieving uniform and high-quality silicon layers in semiconductor wafers. The SiC coating on Graphite Susceptor with SiC Coating offers excellent resistance to chemical corrosion and thermal shock, safeguarding the integrity of the susceptor even under demanding process conditions. This durability translates to extended operational lifespan and reduced downtime, ultimately contributing to higher productivity and cost-effectiveness for semiconductor fabrication facilities.

The barrel design of the Graphite Susceptor with SiC Coating facilitates efficient loading and unloading of wafers, optimizing throughput in epitaxy processes. Additionally, the Graphite Susceptor with SiC Coating is a customized product, and it can be tailored to meet specific requirements and preferences of semiconductor manufacturers, ensuring compatibility with different equipment configurations and process parameters.