CVD and CVI Vacuum Furnace

Semicorex CVD and CVI Vacuum Furnace is a high-quality tool designed for chemical vapor deposition (CVD) processes. The reaction temperatures up to 2200°C. It is capable of depositing a wide range of materials, including silicon carbide, boron nitride, graphene, and more. The CVD furnace has a robust design and is made of high-quality materials, ensuring reliability and durability for long-term use. It has both horizontal and vertical structures.

Application: C/C composite brake disc, crucible, mold and etc.

Features of Semicorex CVD and CVI Vacuum Furnace

1.Robust design made of high-quality materials for long-term use;

2.Precisely controlled gas delivery through the use of mass flow controllers and high-quality valves;

3.Equipped with safety features such as over-temperature protection and gas leak detection for safe and reliable operation;

4.Using multiple temperature control zones, great temperature uniformity;

5.Specially designed deposition chamber with good sealing effect and great anti-contamination performance;

6.Using multiple deposition channels with uniform gas flow, without deposition dead corners and perfect deposition surface;

7.It has treatment for the tar, solid dust, and organic gases during the deposition process

Optional Features:

•Furnace door: screw/hydraulic/manual elevation type;swing opening/parallel opening(large size

furnace door); manual tight/ auto lock-ring tight

• Furnace vessel: all carbon steel/inner layer stainless steel/all stainless steel

•Furnace hot zone: soft carbon felt/soft graphite felt/rigid composite felt/CFC

•Heating element and muffle: isostatic press graphite/high purity, strength and density graphite/fine size graphite

• Process gas system: volume/mass flow-meter

• Thermocouple: K type/N type/C type/S type

*The above parameters can be adjusted to the process requirements, they are not as acceptance standard, the detail spec. will be stated in the technical proposal and agreements.