Annular-Grooved Alumina Chucks

Semicorex annular-grooved alumina chucks adopt a surface structure consisting of a series of multiple concentric annular grooves. When connected with the vacuum pump, these grooves form ring-shaped negative pressure zones to stably hold thin wafers and workpieces with precise positioning. Semicorex annular-grooved alumina chucks function well under working conditions requiring stringent flatness management and evenly distributed adsorption force, which are widely applied in wafer holding, exposure positioning, plasma etching, as well as wafer inspection and transfer processes.

Advantages of Semicorex annular-grooved alumina chucks

1. Exceptional high-temperature resistance

Alumina ceramics fabricated by densification sintering exhibit remarkable thermal performance. Owing to this material property, Semicorex annular-grooved alumina chucks perform stably under extreme high-temperature working environments without structural deformation and performance degradation in long-term usage.

2. Uniform adsorption force

Semicorex annular-grooved alumina chucks feature multiple annular grooves on their adsorption surface, in which stable ring-shaped vacuum zones are formed. This configuration enables consistent adsorption force across main wafer contact areas, which thus significantly lowers partial wafer deformation and warpage.

3. Superior structural stability and high repeat positioning accuracy

Boasting superior material rigidity and structural stability, Semicorex annular-grooved alumina chucks are able to maintain excellent flatness and consistent positioning accuracy during repeated vacuum clamping operation for a long time.

4. Strong chemical corrosion resistance

Because of alumina's reliable chemical stability, Semicorex annular-grooved alumina chucks feature outstanding resistance to most acidic and alkaline substances, as well as various corrosive process gases and are highly adapted to challenging corrosive operating conditions.

5. Excellent cleanliness

Thanks to stringent material purity control and densification treatment, Semicorex annular-grooved alumina chucks rarely shed particles or release impurities in service, which fully satisfies the rigorous low-contamination standards in semiconductor cleanrooms.

Why choose Semicorex?

As the industry-leading company in China, Semicorex is backed with integrated production lines and a well-experienced technical team. We can offer tailored technical support and optimized process solutions to our customers and provide them with non-standard customization manufacturing of our annular-grooved alumina chucks in material purity, chucks’ shape, dimensions, flatness, tolerances and other requirements.