Alumina Ceramic End Effector

Semicorex Alumina Ceramic End Effector is an essential tool in automated wafer transfer systems, offering unmatched mechanical strength, thermal stability, and chemical resistance. Manufactured using high-purity alumina (Al₂O₃) ceramic, this end effector is engineered to meet the stringent demands of wafer processing environments, where precision, cleanliness, and durability are paramount.

Semiconductor robot arms are one of the important parts of semiconductor equipment. They are usually composed of controllers, drivers, arms and end effectors. They are characterized by high cleanliness, high stability, high precision, high efficiency and high reliability. Semiconductor robots are mainly used in the front-end process of semiconductor manufacturing to carry, transport and position semiconductor wafers.

The ceramic structure having alumina content typically greater than 99.5% will provide superior hardness and wear resistance for repeated motions in high-precision environments without degradation over time. The high thermal conductivity and low thermal expansion of alumina allow for dimensional stability in environments with elevated temperature, a necessity in most cleanroom operations in semiconductors, such as in an etcher, depositter, inspection, or cleaning tool.

The alumina ceramic end effector has a notable characteristic surface finish that is smooth and has low porosity, making it near zero particles generated and minimization or zero effect on contaminants during wafer handling. Additionally, alumina is chemically inert. This means it will not react with any of the process gases and any process liquids that the wafer is in contact with. This protects the wafer and any contamination to itself and equipment from anything that may cause corrosion.

They are generally used as end effectors, or a clamping mechanism, for robotic arms or transfer modules in wafer fabrication equipment and equipment like an etcher or depostion tool, inspection or cleaning tool with precise slots, grooves, or vacuum channels capturing the actual wafer size whether it be 100 mm, 200 mm, or 300 mm and transferring wafers and capturing for replacement. The end effectors will typically handle wafer transfers speeds at 25 cm/second.

Customization options exist along the lines of designed for specific equipment interfaces or wafer sizes. The structural rigidity of alumina allows for thin and lightweight profiles that minimize the handling system's overall mass and lead to faster response times. Some configurations may also add anti-static or insulating components to provide additional protection to the sensitive electronic substrates.

Overall, the Alumina Ceramic End Effector provides an effective solution that promotes improved yield and reduced contamination, where operational reliability is key elements for the wafer processing line. With its durability and physical performance characteristics, the effective and cost effective alumina ceramic end effector distinguishes itself as a popular choice amongst semiconductor equipment manufacturers and fabs that require stringent production standards in an ultra-clean environment.