Alumina Bernoulli Robotic Arms

​Robotic arms are mainly applied in the front-end processes of semiconductor manufacturing like photolithography and etching, where they directly participate in the handling, transfer, and positioning of semiconductor wafers. Semicorex alumina Bernoulli robotic arms are ceramic end-effectors that achieve wafer adsorption and transfer based on the Bernoulli principle, delivering exceptional performance in cleanliness, stability, precision, efficiency and reliability.

Non-Contact Adsorption

Semicorex alumina Bernoulli robotic arms can achieve firm and stable non-contact adsorption of wafers by utilizing their specially designed configuration and airflow system. This non-contact operating method can avoid direct contact with semiconductor wafers and greatly prevent wafer contamination or damage brought on by physical contact, which is especially appropriate the ultra-clean working conditions and delicate wafer transfer.

Reliable Physical and Chemical performance

Alumina ceramic features excellent hardness and strength, making Semicorex alumina Bernoulli robotic arms well-suited for the long-term handling of semiconductor wafers without deformation and damage.

Semicorex alumina Bernoulli robotic arms also deliver dependable chemical corrosion resistance and can withstand the challenging corrosive gases and plasma operating environments, exhibiting constant durability over a long period of time.

Strict cleanliness control

Semicorex alumina Bernoulli robotic arms are manufactured from high-purity alumina powder through precision isostatic pressing and high-temperature sintering. This precise material selection and processing method allows Semicorex alumina Bernoulli robotic arms having a pure and dense ceramic structure. This significantly lowering the risks of wafer contamination caused by the unwanted impurities from operating conditions.

Superior precision control

Finished with precise grinding and polishing, Semicorex alumina Bernoulli robotic arms deliver exceptional dimensional accuracy and superior surface flatness, which makes them highly suitable for high-precision automated semiconductor manufacturering. Additionally, Semicorex alumina Bernoulli robotic arms boast excellent thermal stability even when they are exposed to the environments with severe temperature fluctuations, they can maintain excellent repetitive positioning and handling precision.