Semicorex Alumina Ceramic Robot Arms

Featuring high cleanliness, excellent parallelism, precise dimension, stable reliability, and efficient operation, ceramic robot arms are the indispensable components extensively applied in advanced semiconductor manufacturing. With the continuous advancement of industrial automation, market demand for ceramic robot arms keeps growing steadily.

Material properties of Semicorex alumina ceramic

High-end industries, including wafer manufacturing, the photovoltaic field, and precision electronics sectors, impose stringent operational requirements on equipment components. Semicorex alumina ceramic robot arms can fully satisfy these stringent demands of semiconductor manufacturing under vacuum and high-temperature conditions thanks to their superior material performance shown below.  

1. High mechanical strength and hardness

2. High melting point and reliable thermal stability

3. Exceptional chemical corrosion

4. Excellent electrical insulation performance

Data sheet of Semicorex alumina ceramic

The above data is for reference only

Applications of Semicorex alumina ceramic robot arms

1.High-accuracy handling

Semicorex alumina ceramic robot arms are ideal for stable wafer handling and high-precision wafer gripping and transfer in contamination-sensitive wafer manufacturing workshops in the semiconductor and photovoltaic fields, reliably securing wafer cleanliness and chip yield rate.

2.Chemical processing

Semicorex alumina ceramic robot arms are able to endure the corrosion of the strong acids and alkalis and are well-suited for operation under aggressive chemical conditions,such as in the chemical industry and new energy battery production fields.

3.High temperature manufacturingSemicorex alumina ceramic robot arms can be widely used in the glass production, casting and metallurgy fields because they can fulfill the demands for maintaining dependable strength and stability under challenging high-temperature environments.