White Color Ffkm O Ring for Semiconductor

Semicorex durable focus rings for semiconductor processing are designed to withstand the extreme environments of plasma etch chambers used in semiconductor processing. Our focus rings are made of high-purity graphite coated with a dense, wear-resistant silicon carbide (SiC) coating. The SiC coating has high corrosion and heat resistance properties, as well as excellent thermal conductivity. We apply SiC in thin layers onto the graphite using the chemical vapor deposition (CVD) process to improve the service life of our focus rings.

Send Inquiry

Product Description

Our items are commonly identified and trusted by people and can fulfill repeatedly altering economic and social wants of White Color Ffkm O Ring for Semiconductor, We generally concertrating on creating new creative item to meet request from our clients everywhere in the world. Be a part of us and let's make driving safer and funnier alongside one another! White Color Ffkm O Ring for Semiconductor Creamy-White Color Ffkm Seal, Perfluoroelastomer O-Ring, Ffpm O-Rings, Now, with the development of internet, and the trend of internationalization, we've got decided to extend business to overseas market. With the propose of bringing more profits to oversea customers by providing directly abroad. So we have changed our mind, from home to abroad, hope to provide our customers more profit, and looking forward to more chance to make business.

Our White Color Ffkm O Ring for Semiconductor are designed to improve etch uniformity around the wafer edge or perimeter, minimizing contamination and unscheduled maintenance. They are highly stable for rapid thermal annealing (RTA), rapid thermal processing (RTP), and harsh chemical cleaning.

At Semicorex, we focus on providing high-quality, cost-effective White Color Ffkm O Ring for Semiconductor, we prioritize customer satisfaction and provide cost-effective solutions. We look forward to becoming your long-term partner, delivering high-quality products and exceptional customer service.

Parameters of White Color Ffkm O Ring for Semiconductor

Main Specifications of CVD-SIC Coating
SiC-CVD Properties
Crystal Structure	FCC β phase
Density	g/cm ³	3.21
Hardness	Vickers hardness	2500
Grain Size	μm	2~10
Chemical Purity	%	99.99995
Heat Capacity	J·kg-1 ·K-1	640
Sublimation Temperature	℃	2700
Felexural Strength	MPa (RT 4-point)	415
Young’ s Modulus	Gpa (4pt bend, 1300℃)	430
Thermal Expansion (C.T.E)	10-6K-1	4.5
Thermal conductivity	(W/mK)	300

Features of White Color Ffkm O Ring for Semiconductor

● High-purity graphite and SiC coating for pinhole resistance and higher lifetime.

● Both the graphite substrate and SiC layer have high thermal conductivity and excellent heat distribution properties.

● SiC coating is applied in thin layers to improve service life.

Hot Tags: Creamy-White Color Ffkm Seal, Perfluoroelastomer O-Ring, Ffpm O-Rings

Send Inquiry

Please Feel free to give your inquiry in the form below. We will reply you in 24 hours.