Wafer Carrier for Semiconductor Industry

Semicorex MOCVD Wafer Carriers for Semiconductor Industry is a top-of-the-line carrier designed for use in the semiconductor industry. Its high-purity material ensures even thermal profile and laminar gas flow pattern, delivering high-quality wafers.

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Product Description

"Based on domestic market and expand abroad business" is our progress strategy for Wafer Carrier for Semiconductor Industry, We're going to provide high-quality merchandise and excellent products and services at competitive costs. Start benefiting from our comprehensive products and services by contacting us today. Wafer Carrier for Semiconductor Industry Quartz Boat, 8" Quartz Boat, High Purity Quartz Boat, In order to meet more market demands and long-term development, a 150, 000-square-meter new factory is under construction, which might be put into use in 2014. Then, we shall own a large capacity of producing. Of course, we will continue improving the service system to meet the requirements of customers, bringing health, happiness and beauty to everyone.

Our Wafer Carrier for Semiconductor Industry is highly pure, made by CVD chemical vapor deposition under high-temperature chlorination conditions, ensuring uniformity and consistency of the product. It is also highly corrosion-resistant, with a dense surface and fine particles, making it resistant to acid, alkali, salt, and organic reagents. Its high-temperature oxidation resistance ensures stability at high temperatures up to 1600°C.
Contact us today to learn more about our Wafer Carrier for Semiconductor Industry.

Parameters of Wafer Carrier for Semiconductor Industry

Main Specifications of CVD-SIC Coating
SiC-CVD Properties
Crystal Structure	FCC β phase
Density	g/cm ³	3.21
Hardness	Vickers hardness	2500
Grain Size	μm	2~10
Chemical Purity	%	99.99995
Heat Capacity	J·kg-1 ·K-1	640
Sublimation Temperature	℃	2700
Felexural Strength	MPa (RT 4-point)	415
Young’ s Modulus	Gpa (4pt bend, 1300℃)	430
Thermal Expansion (C.T.E)	10-6K-1	4.5
Thermal conductivity	(W/mK)	300

Features of SiC Coated Graphite Susceptor for MOCVD

- Avoid peeling off and ensure coating on all surface
High temperature oxidation resistance: Stable at high temperatures up to 1600°C
High purity: made by CVD chemical vapor deposition under high temperature chlorination conditions.
Corrosion resistance: high hardness, dense surface and fine particles.
Corrosion resistance: acid, alkali, salt and organic reagents.
- Achieve the best laminar gas flow pattern
- Guarantee evenness of thermal profile
- Prevent any contamination or impurities diffusion

Hot Tags: Quartz Boat, 8" Quartz Boat, High Purity Quartz Boat

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