Tray Carrier

Semicorex provides semiconductor-grade ceramics for your OEM semi fabrication tools and wafer handling components focusing on silicon carbide layers in semiconductor industries. We have been manufacturer and supplier of Wafer Carrier Tray for many years. Our Wafer Carrier Tray has a good price advantage and cover most of the European and American markets. We look forward to becoming your long-term partner in China.

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Product Description

We always get the job done being a tangible workforce making sure that we can easily give you the very best quality as well as finest selling price for Tray Carrier, We are wanting forward to even larger cooperation with abroad customers dependant on mutual rewards. Make sure you sense free to make contact with us for more depth! Tray Carrier Power Transmission Parts, Mechanical Components, CNC Machined Parts, we've got complete material production line, assembling line , quality control system, and the most importantly, we have many patents technology and experienced technical&production team, specialist sales service team. With all these advantages, we are gonna create"the reputable international brand of nylon monofilaments", and spreading our goods to every corner of the world. We have been keep moving and try our best to serve our customers.

Not only for thin film deposition phases such as epitaxy or MOCVD, or wafer handling processing, Semicorex supplies ultra-pure ceramic carrier used to support wafers. At the core of the process, the Tray Carrier for the MOCVD, are first subjected to the deposition environment, so it has high heat and corrosion resistance. The SiC coated carrier also has a high thermal conductivity, and excellent heat distribution properties.
Contact us today to learn more about our Tray Carrier.

Parameters of Tray Carrier

Technical Properties
Index	Unit	Value
Material Name		Reaction Sintered Silicon Carbide	Pressureless Sintered Silicon Carbide	Recrystallized Silicon Carbide
Composition		RBSiC	SSiC	R-SiC
Bulk Density	g/cm3	3	3.15 ± 0.03	2.60-2.70
Flexural Strength	MPa (kpsi)	338(49)	380(55)	80-90 (20°C) 90-100(1400°C)
Compressive Strength	MPa (kpsi)	1120(158)	3970(560)	> 600
Hardness	Knoop	2700	2800	/
Breaking Tenacity	MPa m1/2	4.5	4	/
Thermal Conductivity	W/m.k	95	120	23
Coefficient of Thermal Expansion	10^-6.1/°C	5	4	4.7
Specific Heat	Joule/g 0k	0.8	0.67	/
Max temperature in air	℃	1200	1500	1600
Elastic Modulus	Gpa	360	410	240

The difference between SSiC and RBSiC:

1. Sintering process is different. RBSiC is to infiltrate free Si into silicon carbide at a low temperature, SSiC is formed by natural shrinkage at 2100 degrees.

2. SSiC have smoother surface, higher density and higher strength, for some sealings with more strict surface requirements, SSiC will be better.

3. Different used time under different PH and temperature, SSiC is longer than RBSiC

Features of Tray Carrier

- CVD Silicon Carbide coatings to improve service life.
- Thermal insulation made of high-performance purified rigid carbon.
- Both the graphite substrate and silicon carbide layer have a high thermal conductivity, and excellent heat distribution properties.
- High-purity graphite and SiC coating for pinhole resistance and higher lifetime

Available shapes of silicon carbide ceramics：

● Ceramic rod / ceramic pin / ceramic plunger

● Ceramic tube / ceramic bushing / ceramic sleeve

● Ceramic ring / ceramic washer / ceramic spacer

● Ceramic disc

● Ceramic plate / ceramic block

● Ceramic ball

● Ceramic piston

● Ceramic nozzle

● Ceramic crucible

● Other custom ceramic parts