Semicorex engineers semiconductor-grade ceramics for your OEM semi fabrication tools and wafer handling components. Our Silicon Carbide Wafer Boat has a good price advantage and cover many of the European and American markets. We look forward to becoming your long-term partner in China.
Semicorex's Sic Silicon carbide refractory bricks sic carbide tiles, featuring extremely high purity (up to 99.99%), excellent plasma resistance and heat resistance, and restricted particle occurrence, is used in semiconductor processing equipment parts, including structural components and tools.
At Semicorex, we focus on providing high-quality, cost-effective Sic Silicon carbide refractory bricks sic carbide tiles, we prioritize customer satisfaction and provide cost-effective solutions. We look forward to becoming your long-term partner, delivering high-quality products and exceptional customer service.
Contact us today to learn more about our Sic Silicon carbide refractory bricks sic carbide tiles.
Parameters of Sic Silicon carbide refractory bricks sic carbide tiles
Technical Properties |
||||
Index |
Unit |
Value |
||
Material Name |
Reaction Sintered Silicon Carbide |
Pressureless Sintered Silicon Carbide |
Recrystallized Silicon Carbide |
|
Composition |
RBSiC |
SSiC |
R-SiC |
|
Bulk Density |
g/cm3 |
3 |
3.15 ± 0.03 |
2.60-2.70 |
Flexural Strength |
MPa (kpsi) |
338(49) |
380(55) |
80-90 (20°C) 90-100(1400°C) |
Compressive Strength |
MPa (kpsi) |
1120(158) |
3970(560) |
> 600 |
Hardness |
Knoop |
2700 |
2800 |
/ |
Breaking Tenacity |
MPa m1/2 |
4.5 |
4 |
/ |
Thermal Conductivity |
W/m.k |
95 |
120 |
23 |
Coefficient of Thermal Expansion |
10-6.1/°C |
5 |
4 |
4.7 |
Specific Heat |
Joule/g 0k |
0.8 |
0.67 |
/ |
Max temperature in air |
℃ |
1200 |
1500 |
1600 |
Elastic Modulus |
Gpa |
360 |
410 |
240 |
The difference between SSiC and RBSiC:
1. Sintering process is different. RBSiC is to infiltrate free Si into silicon carbide at a low temperature, SSiC is formed by natural shrinkage at 2100 degrees.
2. SSiC have smoother surface, higher density and higher strength, for some sealings with more strict surface requirements, SSiC will be better.
3. Different used time under different PH and temperature, SSiC is longer than RBSiC
Features of Sic Silicon carbide refractory bricks sic carbide tiles
Superior heat resistance & thermal uniformity
Fine SiC crystal coated for a smooth surface
High durability against chemical cleaning
Material is designed so that cracks and delamination do not occur.