Sic Rod Heating Elements for High Temperature Industry Electric Furnace

Sic Rod Heating Elements for High Temperature Industry Electric Furnace

When it comes to wafer handling processes such as epitaxy and MOCVD, Semicorex's High-Temperature SiC Coating for Plasma Etch Chambers is the top choice. Our carriers provide superior heat resistance, even thermal uniformity, and durable chemical resistance thanks to our fine SiC crystal coating.

Send Inquiry

Product Description

We purpose to understand high quality disfigurement with the output and supply the top service to domestic and overseas buyers wholeheartedly for Sic Rod Heating Elements for High Temperature Industry Electric Furnace, Seeing believes! We sincerely welcome the new prospects abroad to set up company interactions and also expect to consolidate the interactions with all the long-established clients. Sic Rod Heating Elements for High Temperature Industry Electric Furnace Silicon Carbide Rod, Silicon Carbide Heating Rod, Sic Rod, By continuous innovation, we will supply you with more valuable merchandise and services, and also make a contribution for the development of the automobile industry at home and abroad. Both domestic and foreign merchants are strongly welcomed to join us to grow together.

At Semicorex, we understand the importance of high-quality wafer handling equipment. That's why our Sic Rod Heating Elements for High Temperature Industry Electric Furnace is engineered specifically for high-temperature and harsh chemical cleaning environments. Our carriers provide even thermal profiles, laminar gas flow patterns, and prevent contamination or impurities diffusion.
Contact us today to learn more about our Sic Rod Heating Elements for High Temperature Industry Electric Furnace.


Parameters of Sic Rod Heating Elements for High Temperature Industry Electric Furnace

Main Specifications of CVD-SIC Coating

SiC-CVD Properties

Crystal Structure

FCC β phase

Density

g/cm ³

3.21

Hardness

Vickers hardness

2500

Grain Size

μm

2~10

Chemical Purity

%

99.99995

Heat Capacity

J·kg-1 ·K-1

640

Sublimation Temperature

2700

Felexural Strength

MPa (RT 4-point)

415

Young’ s Modulus

Gpa (4pt bend, 1300℃)

430

Thermal Expansion (C.T.E)

10-6K-1

4.5

Thermal conductivity

(W/mK)

300


Features of Sic Rod Heating Elements for High Temperature Industry Electric Furnace

- Avoid peeling off and ensure coating on all surface

High temperature oxidation resistance: Stable at high temperatures up to 1600°C

High purity: made by CVD chemical vapor deposition under high temperature chlorination conditions.

Corrosion resistance: high hardness, dense surface and fine particles.

Corrosion resistance: acid, alkali, salt and organic reagents.

- Achieve the best laminar gas flow pattern

- Guarantee evenness of thermal profile

- Prevent any contamination or impurities diffusion





Hot Tags: Silicon Carbide Rod, Silicon Carbide Heating Rod, Sic Rod

Send Inquiry

Please Feel free to give your inquiry in the form below. We will reply you in 24 hours.
X
We use cookies to offer you a better browsing experience, analyze site traffic and personalize content. By using this site, you agree to our use of cookies. Privacy Policy
Reject Accept