The Semicorex Carbide-Coated Reactor Barrel Susceptor is a premium quality graphite product coated with high-purity SiC, designed specifically for LPE processes. With excellent heat and corrosion resistance, this product is perfect for use in semiconductor manufacturing applications.
If you're looking for a high-performance graphite susceptor for epitaxial layer formation on semiconductor wafers, the Semicorex Sic Grinding Barrel Silicon Carbide Ceramic Bushing is an excellent choice. Its silicon carbide coating provides superior heat distribution and thermal conductivity, ensuring exceptional performance in even the most demanding high-temperature environments.
At Semicorex, we focus on providing high-quality, cost-effective Sic Grinding Barrel Silicon Carbide Ceramic Bushing, we prioritize customer satisfaction and provide cost-effective solutions. We look forward to becoming your long-term partner, delivering high-quality products and exceptional customer service.
Parameters of Sic Grinding Barrel Silicon Carbide Ceramic Bushing
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Main Specifications of CVD-SIC Coating |
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SiC-CVD Properties |
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Crystal Structure |
FCC β phase |
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Density |
g/cm ³ |
3.21 |
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Hardness |
Vickers hardness |
2500 |
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Grain Size |
μm |
2~10 |
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Chemical Purity |
% |
99.99995 |
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Heat Capacity |
J·kg-1 ·K-1 |
640 |
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Sublimation Temperature |
℃ |
2700 |
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Felexural Strength |
MPa (RT 4-point) |
415 |
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Young’ s Modulus |
Gpa (4pt bend, 1300℃) |
430 |
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Thermal Expansion (C.T.E) |
10-6K-1 |
4.5 |
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Thermal conductivity |
(W/mK) |
300 |
Features of Sic Grinding Barrel Silicon Carbide Ceramic Bushing
- Both the graphite substrate and silicon carbide layer have good density and can play a good protective role in high temperature and corrosive working environments.
- Silicon carbide coated susceptor used for single crystal growth has a very high surface flatness.
- Reduce the difference in thermal expansion coefficient between the graphite substrate and silicon carbide layer, effectively improve the bonding strength to prevent cracking and delamination.
- Both the graphite substrate and silicon carbide layer have a high thermal conductivity, and excellent heat distribution properties.
- High melting point, high temperature oxidation resistance, corrosion resistance.




