Semiconductor Alumina Ceramic Wafer Loader Arm for Wafer Handling

Semicorex End Effector for Wafer Handling are dimensionally precise and thermally stable for wafer processing. We have been manufacturer and supplier of silicon carbide coating elements for many years. Our products have a good price advantage and cover most of the European and American markets. We look forward to becoming your long-term partner in China.

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Product Description

With state-of-the-art technologies and facilities, strict high-quality management, reasonable price tag, top-quality service and close co-operation with clients, we're devoted to delivering the top value for our consumers for Semiconductor Alumina Ceramic Wafer Loader Arm for Wafer Handling, To find out more about what we could do for you personally, call us anytime. We look forward to setting up good and long-term company interactions along with you. Semiconductor Alumina Ceramic Wafer Loader Arm, Alumina Plate, Ceramic Plate, Our factory is equipped with complete facility in 10000 square meters, which makes us be able to satisfy the producing and sales for most auto part products and solutions. Our advantage is full category, high quality and competitive price! Based on that, our goods win a high admiration both at home and abroad.

Semicorex Semiconductor Alumina Ceramic Wafer Loader Arm for Wafer Handling are dimensionally precise and thermally stable, while having a smooth, abrasion-resistant CVD SiC coating film to safely handle wafers without damaging devices or producing particulate contamination, which can move semiconductor wafers between positions in wafer processing equipment and carriers precisely and efficiently. Our high-purity silicon carbide (SiC) coating Semiconductor Alumina Ceramic Wafer Loader Arm for Wafer Handling provides superior heat resistance, even thermal uniformity for consistent epi layer thickness and resistance, and durable chemical resistance.

At Semicorex, we focus on providing high-quality, cost-effective products to our customers. Our Semiconductor Alumina Ceramic Wafer Loader Arm for Wafer Handling has a price advantage and is exported to many European and American markets. We aim to be your long-term partner, delivering consistent quality products and exceptional customer service.

Parameters of Semiconductor Alumina Ceramic Wafer Loader Arm for Wafer Handling

Main Specifications of CVD-SIC Coating
SiC-CVD Properties
Crystal Structure	FCC β phase
Density	g/cm ³	3.21
Hardness	Vickers hardness	2500
Grain Size	μm	2~10
Chemical Purity	%	99.99995
Heat Capacity	J·kg-1 ·K-1	640
Sublimation Temperature	℃	2700
Felexural Strength	MPa (RT 4-point)	415
Young’ s Modulus	Gpa (4pt bend, 1300℃)	430
Thermal Expansion (C.T.E)	10-6K-1	4.5
Thermal conductivity	(W/mK)	300

Features of Semiconductor Alumina Ceramic Wafer Loader Arm for Wafer Handling

High purity SiC coating used CVD method

Superior heat resistance & thermal uniformity

Fine SiC crystal coated for a smooth surface

High durability against chemical cleaning

Material is designed so that cracks and delamination do not occur.

Hot Tags: Alumina Ceramic Wafer Loader Arm, Alumina Plate, Ceramic Plate

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