Rsic Beams (SIC Kiln Furniture parts) Sic Beam

Semicorex advanced, high-purity Silicon Carbide Coated Components are built to withstand the extreme environments in wafer handling process. Our Semiconductor Wafer Chuck has a good price advantage and cover many of the European and American markets. We look forward to becoming your long-term partner in China.

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Product Description

The client satisfaction is our primary concentrate on. We uphold a consistent level of professionalism, top quality, credibility and service for Rsic Beams (SIC Kiln Furniture parts) Sic Beam, To significantly improve our assistance quality, our company imports a large number of international advanced devices. Welcome clients from your home and abroad to simply call and inquire! Rsic Beams (SIC Kiln Furniture parts) Sic Beam Rsic Beams(Kiln Sic Parts), Kiln Rsic Beams Purlins, Furnace Beams Rsic, You can do one-stop shopping here. And customized orders are acceptable. Real business is to get win-win situation, if possible, we would like to deliver more support for customers. Welcome all nice buyers communicate details of products and solutions and ideas with us!!

Semicorex ultra-flat Rsic Beams (SIC Kiln Furniture parts) Sic Beam is high purity SiC coated using in the wafer handling process. Rsic Beams (SIC Kiln Furniture parts) Sic Beam by MOCVD equipment Compound growth has high heat and corrosion resistance, which has great stability in extreme environment, and improve yield management for semiconductor wafer processing. Low-surface-contact configurations minimize the risk of back-side particles for sensitive applications.

Parameters of Rsic Beams (SIC Kiln Furniture parts) Sic Beam

Main Specifications of CVD-SIC Coating
SiC-CVD Properties
Crystal Structure	FCC β phase
Density	g/cm ³	3.21
Hardness	Vickers hardness	2500
Grain Size	μm	2~10
Chemical Purity	%	99.99995
Heat Capacity	J·kg-1 ·K-1	640
Sublimation Temperature	℃	2700
Felexural Strength	MPa (RT 4-point)	415
Young’ s Modulus	Gpa (4pt bend, 1300℃)	430
Thermal Expansion (C.T.E)	10-6K-1	4.5
Thermal conductivity	(W/mK)	300

Features of Rsic Beams (SIC Kiln Furniture parts) Sic Beam

- CVD Silicon Carbide coatings to improve service life.

- Ultra-flat capabilities

- High stiffness

- Low thermal expansion

- Extreme wear resistance

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