Silicon Carbide Chamber Lid used in crystal growth and wafer handling processing must endure high temperatures and harsh chemical cleaning. Semicorex is a large-scale manufacturer and supplier of Silicon Carbide Coated Graphite Susceptor in China. Our products have a good price advantage and cover many of the European and American markets. We look forward to becoming your long-term partner.
Refractory Silicon Carbide Sic Ceramic Crucible with Lid for Lab Melting used in single crystal growth or MOCVD, or wafer handling processing must endure high temperatures and harsh chemical cleaning. Semicorex supplies high-purity silicon carbide (SiC) coated graphite construction provides superior heat resistance, even thermal uniformity for consistent epi layer thickness and resistance, and durable chemical resistance. They are durable to experience a combination of volatile precursor gases, plasma, and high temperature.
Our Refractory Silicon Carbide Sic Ceramic Crucible with Lid for Lab Melting is designed to achieve the best laminar gas flow pattern, ensuring evenness of thermal profile. This helps to prevent any contamination or impurities diffusion, ensuring high-quality epitaxial growth on the wafer chip.
Contact us today to learn more about our Refractory Silicon Carbide Sic Ceramic Crucible with Lid for Lab Melting.
Parameters of Refractory Silicon Carbide Sic Ceramic Crucible with Lid for Lab Melting
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Main Specifications of CVD-SIC Coating |
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SiC-CVD Properties |
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Crystal Structure |
FCC β phase |
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Density |
g/cm ³ |
3.21 |
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Hardness |
Vickers hardness |
2500 |
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Grain Size |
μm |
2~10 |
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Chemical Purity |
% |
99.99995 |
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Heat Capacity |
J·kg-1 ·K-1 |
640 |
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Sublimation Temperature |
℃ |
2700 |
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Felexural Strength |
MPa (RT 4-point) |
415 |
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Young’ s Modulus |
Gpa (4pt bend, 1300℃) |
430 |
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Thermal Expansion (C.T.E) |
10-6K-1 |
4.5 |
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Thermal conductivity |
(W/mK) |
300 |
Features of Refractory Silicon Carbide Sic Ceramic Crucible with Lid for Lab Melting
● Ultra-flat capabilities
● Mirror polish
● Exceptional light weight
● High stiffness
● Low thermal expansion
● Extreme wear resistance

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