Quartz Plate, Disc, Wafer Holder, Cover, Cap

Semicorex's ICP etching wafer holder is the perfect solution for high-temperature wafer handling processes such as epitaxy and MOCVD. With a stable, high-temperature oxidation resistance of up to 1600°C, our carriers ensure even thermal profiles, laminar gas flow patterns, and prevent contamination or impurities diffusion.

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Product Description

Assume full obligation to meet all demands of our customers; accomplish ongoing advancements by promoting the advancement of our customers; become the final permanent cooperative partner of clientele and maximize the interests of shoppers for Quartz Plate, Disc, Wafer Holder, Cover, Cap, Let's cooperate hand in hand to jointly make a beautiful future. We sincerely welcome you to visit our company or contact us for cooperation! Quartz Plate, Disc, Wafer Holder, Cover, Cap Plate with Clear Quartz, Plate, 6-8inch, With the goal of "zero defect". To care for the environment, and social returns, care employee social responsibility as own duty. We welcome friends from all over the world to visit and guide us so that we can achieve the win-win goal together.

Looking for a reliable supplier of wafer carriers for your epitaxy equipment? Look no further than Semicorex. Our Quartz Plate, Disc, Wafer Holder, Cover, Cap is engineered specifically for high-temperature, harsh chemical cleaning environments. With a fine SiC crystal coating, our carriers provide superior heat resistance, even thermal uniformity, and durable chemical resistance.
Our Quartz Plate, Disc, Wafer Holder, Cover, Cap is designed to achieve the best laminar gas flow pattern, ensuring evenness of thermal profile. This helps to prevent any contamination or impurities diffusion, ensuring high-quality epitaxial growth on the wafer chip.
Contact us today to learn more about our Quartz Plate, Disc, Wafer Holder, Cover, Cap.

Parameters of Quartz Plate, Disc, Wafer Holder, Cover, Cap

Main Specifications of CVD-SIC Coating
SiC-CVD Properties
Crystal Structure	FCC β phase
Density	g/cm ³	3.21
Hardness	Vickers hardness	2500
Grain Size	μm	2~10
Chemical Purity	%	99.99995
Heat Capacity	J·kg-1 ·K-1	640
Sublimation Temperature	℃	2700
Felexural Strength	MPa (RT 4-point)	415
Young’ s Modulus	Gpa (4pt bend, 1300℃)	430
Thermal Expansion (C.T.E)	10-6K-1	4.5
Thermal conductivity	(W/mK)	300