Pancake susceptor for LED epitaxial wafer

Semicorex Blue Green LED Epitaxial Susceptors make the manufacture of high-quality LED wafers more efficient. We have been manufacturer and supplier of silicon carbide coated susceptor for many years. Our Blue Green LED Epitaxial Susceptor has a good price advantage and cover most of the European and American markets. We look forward to becoming your long-term partner in China.

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Product Description

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Our Pancake susceptor for LED epitaxial wafers make the manufacture of high-quality LED wafers more efficient, keeping wavelength deviation to a minimum. Many important factors contribute to this, including the very high purity and uniform thermal conductivity of our isostatic graphite and SiC coatings. SiC coated carbon's coating used MOCVD reactors and super high-purity materials prevent the release of graphite dust and other fine particles, ensuring a clean manufacturing process.

At Semicorex, we focus on providing high-quality, cost-effective products to our customers. Our Pancake susceptor for LED epitaxial wafer has a price advantage and is exported to many European and American markets. We aim to be your long-term partner, delivering consistent quality products and exceptional customer service.

Parameters of Pancake susceptor for LED epitaxial wafer

Main Specifications of CVD-SIC Coating
SiC-CVD Properties
Crystal Structure	FCC β phase
Density	g/cm ³	3.21
Hardness	Vickers hardness	2500
Grain Size	μm	2~10
Chemical Purity	%	99.99995
Heat Capacity	J·kg-1 ·K-1	640
Sublimation Temperature	℃	2700
Felexural Strength	MPa (RT 4-point)	415
Young’ s Modulus	Gpa (4pt bend, 1300℃)	430
Thermal Expansion (C.T.E)	10-6K-1	4.5
Thermal conductivity	(W/mK)	300

Features of Pancake susceptor for LED epitaxial wafer

- Lower wavelength deviation and higher chip yields

- Both the graphite substrate and silicon carbide layer have a high thermal conductivity, and excellent heat distribution properties.

- Tighter dimensional tolerances lead to higher product yield and lower costs

- High-purity graphite and SiC coating for pinhole resistance and higher lifetime

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