Hot Purity Graphite Chuck

Semicorex advanced, high-purity Silicon Carbide Coated Components are built to withstand the extreme environments in wafer handling process. Our Semiconductor Wafer Chuck has a good price advantage and cover many of the European and American markets. We look forward to becoming your long-term partner in China.

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Product Description

Our crew through skilled training. Skilled skilled knowledge, strong sense of company, to meet the company wants of customers for Hot Purity Graphite Chuck, We're one from the largest 100% manufacturers in China. Several large trading corporations import goods from us, so we will supply you with the most effective price tag with all the same quality if you are interested in us. Hot Purity Graphite Chuck, Graphite Boat, Graphite, Certainly, competitive price, suitable package and timely delivery might be assured as per customers' demands. We sincerely hope to build business relationship with you on the basis of mutual benefit and profit in the very near future. Warmly welcome to contact us and become our direct cooperators.

Semicorex ultra-flat Hot Purity Graphite Chuck is high purity SiC coated using in the wafer handling process. Hot Purity Graphite Chuck by MOCVD equipment Compound growth has high heat and corrosion resistance, which has great stability in extreme environment, and improve yield management for semiconductor wafer processing. Low-surface-contact configurations minimize the risk of back-side particles for sensitive applications.

Parameters of Hot Purity Graphite Chuck

Main Specifications of CVD-SIC Coating
SiC-CVD Properties
Crystal Structure	FCC β phase
Density	g/cm ³	3.21
Hardness	Vickers hardness	2500
Grain Size	μm	2~10
Chemical Purity	%	99.99995
Heat Capacity	J·kg-1 ·K-1	640
Sublimation Temperature	℃	2700
Felexural Strength	MPa (RT 4-point)	415
Young’ s Modulus	Gpa (4pt bend, 1300℃)	430
Thermal Expansion (C.T.E)	10-6K-1	4.5
Thermal conductivity	(W/mK)	300

Features of Hot Purity Graphite Chuck

- CVD Silicon Carbide coatings to improve service life.

- Ultra-flat capabilities

- High stiffness

- Low thermal expansion

- Extreme wear resistance

Hot Tags: Graphite Chuck, Graphite Boat, Graphite

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