Semicorex is a large-scale manufacturer and supplier of Silicon Carbide Coated Graphite Susceptor in China. We focus on semiconductor industries such as silicon carbide layers and epitaxy semiconductor. Our Wafer Process Heater has a good price advantage and cover many of the European and American markets. We look forward to becoming your long-term partner.
Semicorex High Temperature Electrical Heating Element Sic Rods Heater for Heat Treatment furnace, 1400c 1500c U W Dumbbell Type Silicon Carbide Rod Sic Heating Elements is made by Silicon Carbide Coating (SiC) graphite, the coating is applied by a CVD method to specific grades of high density graphite, so it can operate in the high temperature furnace with over 3000 °C in an inert atmosphere, 2200°C in vacuum.
The special properties and low mass of the High Temperature Electrical Heating Element Sic Rods Heater for Heat Treatment furnace, 1400c 1500c U W Dumbbell Type Silicon Carbide Rod Sic Heating Elements material allow fast heating rates, uniform temperature distribution and outstanding precision in control. In comparison to other material the surface of Silicon Carbide stays flat due to its low thermal expansion even when operated with fast changes in temperature. The hot plates are very suitable for demanding processes in semiconductor processing systems.
At Semicorex, we focus on providing high-quality, cost-effective products to our customers. Our High Temperature Electrical Heating Element Sic Rods Heater for Heat Treatment furnace, 1400c 1500c U W Dumbbell Type Silicon Carbide Rod Sic Heating Elements has a price advantage and is exported to many European and American markets. We aim to be your long-term partner, delivering consistent quality products and exceptional customer service.
Parameters of High Temperature Electrical Heating Element Sic Rods Heater for Heat Treatment furnace, 1400c 1500c U W Dumbbell Type Silicon Carbide Rod Sic Heating Elements
Technical Specification |
VET-M3 |
Bulk Density (g/cm3) |
≥1.85 |
Ash Content (PPM) |
≤500 |
Shore Hardness |
≥45 |
Specific Resistance (μ.Ω.m) |
≤12 |
Flexural Strength (Mpa) |
≥40 |
Compressive Strength (Mpa) |
≥70 |
Max. Grain Size (μm) |
≤43 |
Coefficient of Thermal Expansion Mm/°C |
≤4.4*10-6 |
Features of High Temperature Electrical Heating Element Sic Rods Heater for Heat Treatment furnace, 1400c 1500c U W Dumbbell Type Silicon Carbide Rod Sic Heating Elements
- CVD SiC coatings to improve service life.
- High temperature resistance, corrosion resistance, long service life, can improve wafer quality and yield.
- It has extremely low coefficient of thermal expansion, high temperature resistance, high wear resistance, good insulation, good chemical stability, and near-purple (red) visible light penetration.
We can provide anti-oxidation and long life span graphite crucible, graphite mold and all parts of graphite heater.