Filtang CVD Disc Vacuum Filter

Silicon Carbide Chamber Lid used in crystal growth and wafer handling processing must endure high temperatures and harsh chemical cleaning. Semicorex is a large-scale manufacturer and supplier of Silicon Carbide Coated Graphite Susceptor in China. Our products have a good price advantage and cover many of the European and American markets. We look forward to becoming your long-term partner.

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Product Description

The incredibly rich projects administration experiences and a person to 1 service model make the substantial importance of organization communication and our easy understanding of your expectations for Filtang CVD Disc Vacuum Filter, We honor our core principal of Honesty in company, priority in service and will do our best to provide our buyers with high-quality products and solutions and great support. Filtang CVD Disc Vacuum Filter, Ceramic Filter, Disc Filter, We welcome you to visit our company and factory. It is also convenient to visit our website. Our sales team will present you the best service. If you have to have more information, remember to feel free to contact us by E-mail or telephone. We have been sincerely hope to establish a good long-term business relationship with you through this opportunity, based on equal, mutual benefit from now till the future.

Filtang CVD Disc Vacuum Filter used in single crystal growth or MOCVD, or wafer handling processing must endure high temperatures and harsh chemical cleaning. Semicorex supplies high-purity silicon carbide (SiC) coated graphite construction provides superior heat resistance, even thermal uniformity for consistent epi layer thickness and resistance, and durable chemical resistance. They are durable to experience a combination of volatile precursor gases, plasma, and high temperature.
Our Filtang CVD Disc Vacuum Filter is designed to achieve the best laminar gas flow pattern, ensuring evenness of thermal profile. This helps to prevent any contamination or impurities diffusion, ensuring high-quality epitaxial growth on the wafer chip.
Contact us today to learn more about our Filtang CVD Disc Vacuum Filter.

Parameters of Filtang CVD Disc Vacuum Filter

Main Specifications of CVD-SIC Coating
SiC-CVD Properties
Crystal Structure	FCC β phase
Density	g/cm ³	3.21
Hardness	Vickers hardness	2500
Grain Size	μm	2~10
Chemical Purity	%	99.99995
Heat Capacity	J·kg-1 ·K-1	640
Sublimation Temperature	℃	2700
Felexural Strength	MPa (RT 4-point)	415
Young’ s Modulus	Gpa (4pt bend, 1300℃)	430
Thermal Expansion (C.T.E)	10-6K-1	4.5
Thermal conductivity	(W/mK)	300

Features of Filtang CVD Disc Vacuum Filter

● Ultra-flat capabilities

● Mirror polish

● Exceptional light weight

● High stiffness

● Low thermal expansion

● Extreme wear resistance

Hot Tags: Disc Vacuum Filter, Ceramic Filter, Disc Filter

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