Ffkm Seals and O Ring for Semiconductor

Semicorex is a large-scale manufacturer and supplier of Silicon Carbide Coated Graphite Susceptor in China. We focus on semiconductor industries such as silicon carbide layers and epitaxy semiconductor. Our Gas Inlet Ring for Semiconductor Equipment has a good price advantage and cover many of the European and American markets. We look forward to becoming your long-term partner in China.

Send Inquiry

Product Description

Our crew through skilled training. Skilled skilled knowledge, strong sense of company, to meet the company wants of customers for Ffkm Seals and O Ring for Semiconductor, Created merchandise with brand price. We attend seriously to produce and behave with integrity, and via the favor of buyers at your house and overseas inside the xxx industry. Ffkm Seals and O Ring for Semiconductor UV Ink Resistance, Perfluoroelastomer O-Ring, Ffpm O-Rings, With many years good service and development, we've a professional international trade sales team. Our products have exported to North America, Europe, Japan, Korea, Australia, New Zealand, Russia and other countries. Looking forward to build up a good and long term cooperation with you in coming future!

Semicorex Ffkm Seals and O Ring for Semiconductor is SiC Coated, which is a dense, wear-resistant silicon carbide (SiC) coating. It has high corrosion and heat resistance properties as well as excellent thermal conductivity. We apply SiC in thin layers onto the graphite using the chemical vapor deposition (CVD) process.

Our Ffkm Seals and O Ring for Semiconductor is designed to achieve the best laminar gas flow pattern, ensuring evenness of thermal profile. This helps to prevent any contamination or impurities diffusion, ensuring high-quality epitaxial growth on the wafer chip.

Parameters of Ffkm Seals and O Ring for Semiconductor

Main Specifications of CVD-SIC Coating
SiC-CVD Properties
Crystal Structure	FCC β phase
Density	g/cm ³	3.21
Hardness	Vickers hardness	2500
Grain Size	μm	2~10
Chemical Purity	%	99.99995
Heat Capacity	J·kg-1 ·K-1	640
Sublimation Temperature	℃	2700
Felexural Strength	MPa (RT 4-point)	415
Young’ s Modulus	Gpa (4pt bend, 1300℃)	430
Thermal Expansion (C.T.E)	10-6K-1	4.5
Thermal conductivity	(W/mK)	300

Features of Ffkm Seals and O Ring for Semiconductor

● High purity SiC coated graphite

● Superior heat resistance & thermal uniformity

● Fine SiC crystal coated for a smooth surface

● High durability against chemical cleaning

● Material is designed so that cracks and delamination do not occur.

Hot Tags: UV Ink Resistance, Perfluoroelastomer O-Ring, Ffpm O-Rings

Send Inquiry

Please Feel free to give your inquiry in the form below. We will reply you in 24 hours.