Semicorex is a large-scale manufacturer and supplier of Silicon Carbide Coated Graphite Susceptor in China. We focus on semiconductor industries such as silicon carbide layers and epitaxy semiconductor. Our SiC End Effector has a good price advantage and cover many of the European and American markets. We look forward to becoming your long-term partner in China.
Semicorex ESD-Safe Carbon Wafer Handling Tweezers is made by Silicon Carbide Coating (SiC) graphite, the coating is applied by a CVD method to specific grades of high density graphite, so it can operate in the high temperature furnace with over 3000 °C in an inert atmosphere, 2200°C in vacuum.
Our ESD-Safe Carbon Wafer Handling Tweezers is designed to achieve the best laminar gas flow pattern, ensuring evenness of thermal profile. This helps to prevent any contamination or impurities diffusion, ensuring high-quality epitaxial growth on the wafer chip.
Contact us today to learn more about our ESD-Safe Carbon Wafer Handling Tweezers.
Parameters of ESD-Safe Carbon Wafer Handling Tweezers
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Main Specifications of CVD-SIC Coating |
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SiC-CVD Properties |
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Crystal Structure |
FCC β phase |
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Density |
g/cm ³ |
3.21 |
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Hardness |
Vickers hardness |
2500 |
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Grain Size |
μm |
2~10 |
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Chemical Purity |
% |
99.99995 |
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Heat Capacity |
J·kg-1 ·K-1 |
640 |
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Sublimation Temperature |
℃ |
2700 |
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Felexural Strength |
MPa (RT 4-point) |
415 |
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Young’ s Modulus |
Gpa (4pt bend, 1300℃) |
430 |
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Thermal Expansion (C.T.E) |
10-6K-1 |
4.5 |
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Thermal conductivity |
(W/mK) |
300 |
Features of ESD-Safe Carbon Wafer Handling Tweezers
- Avoid peeling off and ensure coating on all surface
High temperature oxidation resistance: Stable at high temperatures up to 1600°C
High purity: made by CVD chemical vapor deposition under high temperature chlorination conditions.
Corrosion resistance: high hardness, dense surface and fine particles.
Corrosion resistance: acid, alkali, salt and organic reagents.
- Achieve the best laminar gas flow pattern
- Guarantee evenness of thermal profile
- Prevent any contamination or impurities diffusion


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