1200c CVD/Pecvd Tube Furnace with Mass Flowmeter CVD Vacuum Atmosphere Inert Gas Tube Furnace

Semicorex is a large-scale manufacturer and supplier of Silicon Carbide Coated products in China. We provide custom furnace solutions. Our CVD and CVI Vacuum Furnace has a good price advantage and cover many of the European and American markets. We look forward to becoming your long-term partner.

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Product Description

While in the past few years, our organization absorbed and digested sophisticated technologies both equally at home and abroad. Meanwhile, our corporation staffs a group of experts devoted to your advancement of 1200c CVD/Pecvd Tube Furnace with Mass Flowmeter CVD Vacuum Atmosphere Inert Gas Tube Furnace, As an expert specialized with this field, we have been committed to solving any problem of significant temperature protection for users. 1200c CVD/Pecvd Tube Furnace with Mass Flowmeter CVD Vacuum Atmosphere Inert Gas Tube Furnace 1200c CVD Tube Furnace, Chemical Vapor Deposition Tube Furnace, Customized Vacuum Tube Furnace, All the employees in factory, store, and office are struggling for one common goal to provide better quality and service. Real business is to get win-win situation. We would like to provide more support for customers. Welcome all nice buyers to communicate details of our products and solutions with us!

Semicorex 1200c CVD/Pecvd Tube Furnace with Mass Flowmeter CVD Vacuum Atmosphere Inert Gas Tube Furnace is a high-quality tool designed for chemical vapor deposition (CVD) processes. The reaction temperatures up to 2200°C. It is capable of depositing a wide range of materials, including silicon carbide, boron nitride, graphene, and more. The CVD furnace has a robust design and is made of high-quality materials, ensuring reliability and durability for long-term use. It has both horizontal and vertical structures.

Application: C/C composite brake disc, crucible, mold and etc.

Features of Semicorex 1200c CVD/Pecvd Tube Furnace with Mass Flowmeter CVD Vacuum Atmosphere Inert Gas Tube Furnace

1.Robust design made of high-quality materials for long-term use;

2.Precisely controlled gas delivery through the use of mass flow controllers and high-quality valves;

3.Equipped with safety features such as over-temperature protection and gas leak detection for safe and reliable operation;

4.Using multiple temperature control zones, great temperature uniformity;

5.Specially designed deposition chamber with good sealing effect and great anti-contamination performance;

6.Using multiple deposition channels with uniform gas flow, without deposition dead corners and perfect deposition surface;

7.It has treatment for the tar, solid dust, and organic gases during the deposition process

Optional Features:

•Furnace door: screw/hydraulic/manual elevation type;swing opening/parallel opening(large size

furnace door); manual tight/ auto lock-ring tight

• Furnace vessel: all carbon steel/inner layer stainless steel/all stainless steel

•Furnace hot zone: soft carbon felt/soft graphite felt/rigid composite felt/CFC

•Heating element and muffle: isostatic press graphite/high purity, strength and density graphite/fine size graphite

• Process gas system: volume/mass flow-meter

• Thermocouple: K type/N type/C type/S type

Specifications of CVD Furnace
Model	Working Zone Size (W × H × L) mm	Max. Temperature (°C)	Temperature Uniformity (°C)	Ultimate Vacuum (Pa)	Pressure Increase Rate (Pa/h)
LFH-6900-C	600×600×900	1500	±7.5	1-100	0.67
LFH-10015-C	1000×1000×1500	1500	±7.5	1-100	0.67
LFH-1220-C	1200×1200×2000	1500	±10	1-100	0.67
LFH-1530-C	1500×1500×3000	1500	±10	1-100	0.67
LFH-2535-C	2500×2000×3500	1500	±10	1-100	0.67
LFV-D3050-C	φ300×500	1500	±5	1-100	0.67
LFV-D6080-C	φ600×800	1500	±7.5	1-100	0.67
LFV-D8120-C	φ800×1200	1500	±7.5	1-100	0.67
LFV-D11-C	φ1100×2000	1500	±10	1-100	0.67
LFV-D26-C	φ2600×3200	1500	±10	1-100	0.67

*The above parameters can be adjusted to the process requirements, they are not as acceptance standard, the detail spec. will be stated in the technical proposal and agreements.

Hot Tags: 1200c CVD Tube Furnace, Chemical Vapor Deposition Tube Furnace, Customized Vacuum Tube Furnace

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