1100c CVD/ Pecvd Tube Furnace with Slide Rail CVD Vacuum Atmosphere Inert Gas Tube Furnace

Semicorex is a large-scale manufacturer and supplier of Silicon Carbide Coated products in China. We provide custom furnace solutions. Our CVD and CVI Vacuum Furnace has a good price advantage and cover many of the European and American markets. We look forward to becoming your long-term partner.

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Product Description

We emphasize enhancement and introduce new solutions into the market just about every year for 1100c CVD/ Pecvd Tube Furnace with Slide Rail CVD Vacuum Atmosphere Inert Gas Tube Furnace, We generally hold the philosophy of win-win, and build long-term cooperation partnership with clients from throughout the earth.We believe that our growth base on customer's achievements, credit history is our lifetime. 1100c CVD/ Pecvd Tube Furnace, Industrial Furnace, Belt Furnace, We have customers from more than 20 countries and our reputation has been recognized by our esteemed customers. Never-ending improvement and striving for 0% deficiency are our two main quality policies. Should you need anything, don't hesitate to contact us.

Semicorex 1100c CVD/ Pecvd Tube Furnace with Slide Rail CVD Vacuum Atmosphere Inert Gas Tube Furnace is a high-quality tool designed for chemical vapor deposition (CVD) processes. The reaction temperatures up to 2200°C. It is capable of depositing a wide range of materials, including silicon carbide, boron nitride, graphene, and more. The CVD furnace has a robust design and is made of high-quality materials, ensuring reliability and durability for long-term use. It has both horizontal and vertical structures.

Application: C/C composite brake disc, crucible, mold and etc.

Features of Semicorex 1100c CVD/ Pecvd Tube Furnace with Slide Rail CVD Vacuum Atmosphere Inert Gas Tube Furnace

1.Robust design made of high-quality materials for long-term use;

2.Precisely controlled gas delivery through the use of mass flow controllers and high-quality valves;

3.Equipped with safety features such as over-temperature protection and gas leak detection for safe and reliable operation;

4.Using multiple temperature control zones, great temperature uniformity;

5.Specially designed deposition chamber with good sealing effect and great anti-contamination performance;

6.Using multiple deposition channels with uniform gas flow, without deposition dead corners and perfect deposition surface;

7.It has treatment for the tar, solid dust, and organic gases during the deposition process

Optional Features:

•Furnace door: screw/hydraulic/manual elevation type;swing opening/parallel opening(large size

furnace door); manual tight/ auto lock-ring tight

• Furnace vessel: all carbon steel/inner layer stainless steel/all stainless steel

•Furnace hot zone: soft carbon felt/soft graphite felt/rigid composite felt/CFC

•Heating element and muffle: isostatic press graphite/high purity, strength and density graphite/fine size graphite

• Process gas system: volume/mass flow-meter

• Thermocouple: K type/N type/C type/S type

Specifications of CVD Furnace
Model	Working Zone Size (W × H × L) mm	Max. Temperature (°C)	Temperature Uniformity (°C)	Ultimate Vacuum (Pa)	Pressure Increase Rate (Pa/h)
LFH-6900-C	600×600×900	1500	±7.5	1-100	0.67
LFH-10015-C	1000×1000×1500	1500	±7.5	1-100	0.67
LFH-1220-C	1200×1200×2000	1500	±10	1-100	0.67
LFH-1530-C	1500×1500×3000	1500	±10	1-100	0.67
LFH-2535-C	2500×2000×3500	1500	±10	1-100	0.67
LFV-D3050-C	φ300×500	1500	±5	1-100	0.67
LFV-D6080-C	φ600×800	1500	±7.5	1-100	0.67
LFV-D8120-C	φ800×1200	1500	±7.5	1-100	0.67
LFV-D11-C	φ1100×2000	1500	±10	1-100	0.67
LFV-D26-C	φ2600×3200	1500	±10	1-100	0.67

*The above parameters can be adjusted to the process requirements, they are not as acceptance standard, the detail spec. will be stated in the technical proposal and agreements.

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