Porous Alumina Ceramic Chucks

Semicorex porous alumina ceramic chucks consist mainly of a porous alumina ceramic plate and an alumina ceramic base, and their absorption surfaces are evenly distributed with multiple micropores. Porous alumina ceramic chucks can securely and safely clamp fragile workpieces without causing distortion, edge wraping or breakage and ensure reliable positioning and productive manufacturing, fully meeting the strict requirements for precision and damage-free operating applications.

Advantages of Semicorex porous alumina ceramic chucks

1. Exceptional material properties

Too ensure stable and reliable operating performance, Semicorex carefully selects premium high-purity alumina raw materials to manufacture porous alumina ceramic chucks, endowing them with excellent properties listed as follows.

a. Low impurity content

b. High mechanical strength.

c. Excellent wear resistance

d. Superior high-temperature resistance

e. Reliable corrosion resistance

2. Excellent adsorption performance

Semicorex porous alumina ceramic chucks have an excellent absorption surface, which features multiple uniformly distributed micropores and has the porosity between 35% and 50%, enabling uniform absorption penetration of porous alumina ceramic chucks. The optimized roughness and flatness of their absorption surface can effectively prevent workpiece deformation and scratches, making chucks ideal for processing high-precision workpieces, such as ultra-thin glass, wafers and ceramic sheets.

3. Wide-ranging compatibility

Semicorex offers customized manufacturing of porous alumina ceramic chucks strictly according to customers’ requirements, which ensures perfect compatibility with various processes including grinding, polishing, inspection and other applications.

a. Dimensions

b. Absorption surface profile

c. Porous alumina ceramic color: white, black, brown

d. Micropore size: 5 - 50μm

e. Flatness and Roughness

Applications of Semicorex porous alumina ceramic chucks

Semicorex porous alumina ceramic chucks are the optimal solutions for handling fragile workpieces during high-precision processing, are extensively applied in the following fields.

1. Semiconductor wafer dicing, polishing, bonding,packaging and inspection

2. Precision optical components machining like grinding, polishing and coating.

3. Flat Panel Display (FPD) production and inspection4.Precision processing like lapping, polishing and cutting for thin flat workpieces, such as metal plates, plastic sheets and glass substrates.