Semicorex fused silica crucibles are the crucial thermal-resistant melting containers for the single-crystal silicon ingot pulling via the Czochralski (CZ) process. Partnering with Semicorex means you will obtain the ideal quartz solutions for advanced semiconductor and photovoltaic silicon wafer manufacturing to achieve consistent crystal quality, excellent crystal pulling efficiency and a competitive cost edge.
Fused silica crucibles are supported by graphite crucibles and placed at the core of silicon growth thermal fields, pairing with other thermal field components like thermal insulation cylinders, heaters and guide cylinders to build ideal silicon crystal growth conditions. Designed to hold molten polysilicon for long-term continuous crystal pulling, fused silica crucibles will directly contact polysilicon raw materials, so their material purity, mechanical strength, thermal performance and inner bubble content will impact the silicon ingots’ quality, yield and consistency.
Semicorex manufactured our fused silica crucibles through the electric arc fusion process using PV-grade or semiconductor-grade quartz sand, endowing our crucibles with remarkable performance listed as below.
Semicorex imposes stringent control over fused silica crucibles’ metallic impurity content during production to minimize extra contamination brought by unpurified crucible materials, which greatly guarantees ultra-high purity and superior crystalline quality of silicon ingots.
The hydroxyl content inside Semicorex fused silica crucibles is kept at an extremely low level, which significantly improves the high-temperature resistance of our fused silica crucibles and enables them to maintain stable integral structures under challenging high-temperature silicon crystal growth conditions.
Semicorex fused silica crucibles adopt a multi-layer structure design and their outer layer features dense bubble distribution, which endows crucibles with excellent thermal insulation performance, reliably sustaining the required thermal environment for silicon crystal growth.
Bubbles inside the inner layer of fused silica crucibles are mainly formed by crystal water and gases (CO₂, H₂O, H₂O₂, N₂, CH₄, CO). Semicorex uses high-quality quartz sand with low bubble density for crucibles’ inner layer, effectively mitigating crystal defects on silicon ingots resulting from broken bubbles on the inner surface.
|
Semicorex Main Size of Quartz Crucible |
|||||||
| Unit: mm | |||||||
|
(Spec) |
D |
H | W1 | W2 | W3 | R1 | R2 |
|
14inch |
355±3 |
240±3 |
10±3 |
10±3 |
11±3 |
89 |
381 |
|
16nch |
405±2 |
280±3 |
9±2 |
9±2 |
9±2 |
90 |
450 |
|
18inch |
457±3 |
355±2 |
7-12 |
7-12 |
7-12 |
88-120 |
457-500 |
|
20inch |
505±3 |
385±3 |
11±2 |
11±2 |
11±2 |
120 |
508 |
|
22inch |
555-560 |
406±2 |
11+3/-1 |
11+3/-1 |
11+3/-1 |
127 |
560 |
|
24inch |
609+2/-3 |
440±3 |
11-2/+3 |
12-2/+3 |
12-2/+3 |
120 |
610 |
|
25inch |
632±3 |
460±3 |
11+3/-1 |
11+3/-1 |
14+4/-2 |
120 |
635 |
|
26inch |
654±3 |
500±3 |
12+3/-1 |
12+3/-1 |
14+4/-2 |
120 |
660 |
|
28inch |
708±3 |
556±3 |
13.5±2 |
13.5±2 |
19.0±3 |
120 |
710 |
|
30inch |
758±3 |
580±3 |
13.5±2 |
13.5±2 |
19.0±3 |
120 |
760 |
|
32inch |
810±3 |
680±3 |
15.0±3 |
15.0±3 |
21.0±4 |
120 |
812 |
|
S32inch |
834±4 |
680±3 |
15.0±3 |
15.0±3 |
21.0±4 |
120 |
834 |
|
S36inch |
943±4 |
760±3 |
15.0±3 |
15.0±3 |
22.0±4 |
160 |
947 |
|
40inch |
1016±4 |
760±3 |
15.0±3 |
15.0±3 |
25.0±5 |
160 |
1016 |
In addition to the standard crucible sizes shown in the above table, Semicorex offers custom tailored solutions for non-standard specifications. We are capable of manufacturing customized crucibles based on clients’ technical drawings.