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Fused Silica Crucibles

Fused Silica Crucibles

Semicorex fused silica crucibles are the crucial thermal-resistant melting containers for the single-crystal silicon ingot pulling via the Czochralski (CZ) process. Partnering with Semicorex means you will obtain the ideal quartz solutions for advanced semiconductor and photovoltaic silicon wafer manufacturing to achieve consistent crystal quality, excellent crystal pulling efficiency and a competitive cost edge.

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Product Description

Fused silica crucibles are supported by graphite crucibles and placed at the core of silicon growth thermal fields, pairing with other thermal field components like thermal insulation cylinders, heaters and guide cylinders to build ideal silicon crystal growth conditions. Designed to hold molten polysilicon for long-term continuous crystal pulling, fused silica crucibles will directly contact polysilicon raw materials, so their material purity, mechanical strength, thermal performance and inner bubble content will impact the silicon ingots’ quality, yield and consistency.



Advantages of Semicorex fused silica crucibles


Semicorex manufactured our fused silica crucibles through the electric arc fusion process using PV-grade or semiconductor-grade quartz sand, endowing our crucibles with remarkable performance listed as below.


1. Extreme material purity

Semicorex imposes stringent control over fused silica crucibles’ metallic impurity content during production to minimize extra contamination brought by unpurified crucible materials, which greatly guarantees ultra-high purity and superior crystalline quality of silicon ingots.


2. Exceptional thermal performance

The hydroxyl content inside Semicorex fused silica crucibles is kept at an extremely low level, which significantly improves the high-temperature resistance of our fused silica crucibles and enables them to maintain stable integral structures under challenging high-temperature silicon crystal growth conditions.


3. Outstanding thermal insulation performance

Semicorex fused silica crucibles adopt a multi-layer structure design and their outer layer features dense bubble distribution, which endows crucibles with excellent thermal insulation performance, reliably sustaining the required thermal environment for silicon crystal growth.


4. Minimal Inner layer bubble content

Bubbles inside the inner layer of fused silica crucibles are mainly formed by crystal water and gases (CO₂, H₂O, H₂O₂, N₂, CH₄, CO). Semicorex uses high-quality quartz sand with low bubble density for crucibles’ inner layer, effectively mitigating crystal defects on silicon ingots resulting from broken bubbles on the inner surface.


Standard sizes of Semicorex fused silica crucibles


Semicorex Main Size of Quartz Crucible
Unit: mm
(Spec)
D
H W1 W2 W3 R1 R2
14inch
355±3
240±3
10±3
10±3
11±3
89
381
16nch
405±2
280±3
9±2
9±2
9±2
90
450
18inch
457±3
355±2
7-12
7-12
7-12
88-120
457-500
20inch
505±3
385±3
11±2
11±2
11±2
120
508
22inch
555-560
406±2
11+3/-1
11+3/-1
11+3/-1
127
560
24inch
609+2/-3
440±3
11-2/+3
12-2/+3
12-2/+3
120
610
25inch
632±3
460±3
11+3/-1
11+3/-1
14+4/-2
120
635
26inch
654±3
500±3
12+3/-1
12+3/-1
14+4/-2
120
660
28inch
708±3
556±3
13.5±2
13.5±2
19.0±3
120
710
30inch
758±3
580±3
13.5±2
13.5±2
19.0±3
120
760
32inch
810±3
680±3
15.0±3
15.0±3
21.0±4
120
812
S32inch
834±4
680±3
15.0±3
15.0±3
21.0±4
120
834
S36inch
943±4
760±3
15.0±3
15.0±3
22.0±4
160
947
40inch
1016±4
760±3
15.0±3
15.0±3
25.0±5
160
1016


In addition to the standard crucible sizes shown in the above table, Semicorex offers custom tailored solutions for non-standard specifications. We are capable of manufacturing customized crucibles based on clients’ technical drawings.



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