Ceramic Composite Heaters

Semicorex Ceramic Composite Heaters made from Pyrolytic Boron Nitride–Pyrolytic Graphite (PBN-PG) are innovative products in advanced thermal management systems. They are capable of ultra-high purity, chemical inertness and precise temperatures, making them a great fit for semiconductor manufacturing, vacuum systems, crystal growth, and other high-tech industries.

The PBN-PG composite structure is the primary innovation present in the heaters. Pyrolytic Boron Nitride (PBN) makes up the outer encapsulation of the heaters and provides excellent resistance to chemicals, electrical insulation and high thermal shock resistance. PBN is deposited chemically in vapour, leading to an extremely pure, dense ceramic that is uniform and easily machined. Located within the PBN encapsulation is Pyrolytic Graphite (PG), which has excellent thermal conductivity and anisotropic heat transfer. The PBN-PG composite together creates a heater that takes advantage of the electrical insulation and high chemical tolerance of PBN and the fast thermal conduction of PG.

PBN stands for pyrolytic boron nitride. The preparation process of pyrolytic boron nitride is chemical vapor deposition. The boron nitride produced by this process is white, non-toxic, non-porous and easy to process. The purity is as high as 99.999%, the surface is dense and the airtightness is good. It is resistant to high temperature, acid, alkali, salt and organic reagents, has good thermal shock resistance, good thermal conductivity and low thermal expansion coefficient. It also has high resistance, high dielectric strength, small dielectric constant, low magnetic loss tangent, and good microwave and infrared transmission performance. It has obvious anisotropy in mechanical, thermal, electrical and other properties, and is widely used in semiconductors, optical optoelectronics and other fields.

Customization is always available to accommodate specific application needs that can include shape (disks, rings, cylinders), integrated thermocouples, power ratings, and interface configurations. Typical resistive heater designs operate with either DC or low-frequency AC electrical sources, and designed for longevity and repeatability.

Semicorex PBN-PG Ceramic composite heaters provide a unique combination of cleanliness, thermal performance, and durability. These heaters are the industry's heating solution for reliability, purity, and precision under some of the most demanding thermal environments.