Semiconductor ceramic parts

Semiconductor ceramic parts belong to advanced ceramics and are an indispensable part of the semiconductor manufacturing process. The raw materials for preparation are usually high-purity, ultra-fine inorganic materials, such as aluminum oxide, silicon carbide, aluminum nitride, silicon nitride, yttrium oxide, zirconium oxide, etc.

Aluminum oxide

It is widely used, and the product performance varies according to the purity. 95% purity is light yellow, and 99% purity is snow white. It has excellent rigidity, strength, wear resistance, high temperature resistance and corrosion resistance, and can be used to prepare most semiconductor ceramic parts, such as ceramic nozzles, ceramic arms, etc.

Silicon carbide

It is black, has high thermal conductivity, high strength and hardness, light weight, good shock resistance, and is often used to prepare vacuum arms and vacuum suction cups.

Aluminum nitride

It has high thermal conductivity, a thermal expansion coefficient that matches silicon, a low dielectric constant and dielectric loss, and can be used to make heat dissipation substrates, ceramic nozzles, etc.

Silicon nitride

High melting point, ultra-high hardness, high chemical inertness, low thermal expansion coefficient, high thermal conductivity, good thermal shock resistance, high impact resistance and strength below 1200℃, often used to make ceramic substrates, ceramic tubes, etc.

Yttrium oxide

High melting point, good chemical and photochemical stability, high thermal conductivity, good light transmittance, often combined with alumina to make ceramic windows.

Zirconium oxide

High mechanical strength, high temperature resistance, acid and alkali resistance, good insulation, according to different content can be made of ceramic products for different purposes, such as integrated circuit substrates, etc.

Types of parts:

"All-rounder" semiconductor ceramic parts with different functions are widely used in various types of semiconductor key equipment, mainly including the following:

Semiconductor ceramic arm

Plays a role in semiconductor equipment when transporting wafers, and needs to work in a vacuum clean environment. Usually prepared with high-purity alumina or silicon carbide, alumina is cost-effective and is used more.

Ceramic substrate

Applied in different electronic packaging fields, such as power electronic devices, lasers, etc., and is often prepared with materials such as alumina and silicon nitride.

Ceramic nozzle

In HDP-CVD, its quality affects the purity and flow rate of the reaction gas. Aluminum nitride ceramics are more suitable for advanced process equipment due to their excellent performance.

Ceramic window

It is a key component of the semiconductor etcher. It can be vacuum sealed without affecting the plasma penetration. It is usually made of high-purity alumina and yttrium oxide.

Ceramic chamber cover

It is a key component of the thin film deposition equipment, which is crucial to ensure the quality of the wafer and the sealing of the reaction chamber.

Ceramic vacuum chuck

It is used to position and clamp the silicon wafer. It is a porous ceramic made of two ceramic materials.

Preparation process:

The preparation process of the "craftsmanship" semiconductor ceramic parts is complicated, mainly including the following steps:

Powder preparation

The raw materials need to be reprocessed, and the raw powder that meets the requirements is obtained through batching, mechanical ball milling, spray drying and other processes.

Powder molding

Dry pressing, isostatic pressing, tape casting, injection molding, gel injection molding and other methods are commonly used to make the powder into ceramic green body.

High temperature sintering

The ceramic green body is transformed into a dense cooked body through normal pressure sintering, vacuum sintering, atmosphere sintering and other methods.

Precision machining

The sintered ceramic cooked body is processed with CNC lathes, grinders, etc. to achieve the required size and precision.

Quality inspection

The appearance, size, porosity, roughness and other properties of ceramic parts are tested to ensure product quality.

Surface treatment

The surface of the products that pass the quality inspection is cleaned, and further surface treatment is required for special needs, such as arc spraying, plasma spraying, etc.

Semicorex offers high-quality ceramic parts in semiconductor. If you have any inquiries or need additional details, please don't hesitate to get in touch with us.

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