Quartz Furnace Tubes

Serving as the core chamber components, quartz furnace tubes are widely used for high-temperature equipment, including oxidation furnaces, diffusion furnaces, annealing furnaces and thin film deposition systems. They are able to stably support wafers and shield the internal cavity from outside interference. Fitted with the gas inlets, quartz furnace tubes enable precise regulation of process gas within the tube, creating a stable and controllable reaction atmosphere for high-precision wafer thermal treatment. For this reason, choosing a suitable quartz furnace tube will exert a direct impact on the production yield and processing efficiency of semiconductor wafer manufacturing.

Advantages of Semicorex quartz furnace tubes

Semicorex produces our quartz furnace tubes by adopting premium photovoltaic-grade or semiconductor-grade quartz raw materials, endowing them with the excellent performance listed as follows:  

1. Ultra-high cleanliness

Semicorex quartz furnace tubes boast high ultra-high purity with extremely low metallic impurities such as Na, K and Fe, effectively minimizing wafer contamination caused by the precipitation of impurity ions during high-temperature operation.

2. Excellent thermal management capability

With superior high-temperature resistance and thermal shock resistance, Semicorex quartz furnace tubes can withstand drastic thermal cyclings in semiconductor and photovoltaic production lines.

3. Reliable chemical stability

Semicorex quartz furnace tubes will barely react with most acids, alkalis, and process gases at room temperatures and high temperatures, significantly withstanding chemical corrosion and preventing contamination risks resulting from tube materials.

Custom quartz furnace tube solutions

Semicorex always puts customers’ needs first. Semicorex offers careful custom manufacturing services to ensure flawless compatibility with customers’ equipment. Based on customers’ technical drawings and furnace parameters, Semicorex can tailor-make quartz furnace tubes, covering material purity, tube diameter, overall length, wall thickness, flange connections, structural profiles and surface treatment.

Applications of Semicorex quartz furnace tubes

1. Semiconductor industry

Semicorex quartz furnace tubes are widely applied for wafer thermal treatment to carry out wafer oxidation, doping, annealing and thin film deposition procedures.

2. Photovoltaic field

Semicorex quartz furnace tubes can serve as the core parts of diffusion furnaces used for silicon wafer junction diffusion in solar cell fabrication.