Fused Quartz Bell Jars

As the name suggests, Semicorex fused quartz bell jars adopt a semicircular bell-shaped structure with a flat bottom and a top opening, which are typically assembled with matching flanges. As the reliable reaction chamber parts, Semicorex fused quartz bell jars are able to provide a clean and controllable reaction condition for high-precision semiconductor manufacturing, which can effectively block external contamination sources, thus minimizing defect rates and enabling consistent processing results.

Advantages of Semicorex fused quartz bell jars

1. High-quality material selections

Semicorex manufactures our fused quartz bell jars with carefully selected semiconductor-grade fused quartz, which endows them with excellent characteristics listed as follows:

A. Extremely low level of impurities

Semicorex fused quartz bell jars feature high purity, with trace metallic elements like Al, Fe, Na and K limited to ppb levels.

B. Superior thermal stability

Semicorex fused quartz bell jars have ultra-low thermal expansion coefficient, which allows them resist structural fatigue even under severe temperature cycling.

C. Stable chemical inertness

Semicorex fused quartz bell jars exhibit remarkable anti-corrosion performance against most acids (HF excluded) and corrosive process gases to withstand harsh semiconductor processing environments.

D. High optical transparency

Semicorex fused quartz bell jars offer high transmittance across UV, infrared and visible light, making them suited for precision processes that need visual monitoring.

2. High-precision machining processes

Through a series of precise procedures, including forming, bubble control, joint machining, surface finishing, thermal annealing and inspection, Semicorex fused quartz bell jars can fully meet the stringent demands of modern semiconductor wafer fabrications.

A. Precision production

Semicorex fused quartz bell jars are produced under tight tolerance control to perfect fit with diverse equipment.

B. Custom solutions

Semicorex offers non-standard custom manufacturing of our fused quartz bell jars strictly following customers’ drawings.

C. Long reliable lifespan

Semicorex fused quartz bell jars feature consistent performance and exceptional durability, which can significantly lower equipment downtime and component replacement costs.